| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable ink-jet head capable of maintaining substantially constantly the electric resistance value of a heat generating resistor, or the like over a long term. SOLUTION: The ink-jet head comprises a head substrate 1 produced by adhering a plurality of heat generating resistors 3 made of a TiSiO-based resistor material on the upper surface of a base plate 2 and covering the heat generating resistors 3 with a protection layer 5, and a top plate 8 disposed with a predetermined gap provided with respect to the head substrate 1 for ejecting an ink 10 filled in the gap between the head substrate 1 and the top plate 8 from an ink ejection hole 9 by the heat generation of the heat generating resistors 3. The protection layer 5 of the head substrate 1 is formed by successively laminating a first layer 6 made of an inorganic material containing an Si oxide and/or an Si nitride, and a second layer 7 made of a sintered compact of a perhydropolysilazane. COPYRIGHT: (C)2003,JPO
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