发明名称 Method for the manufacture of a substrate, substrate manufactured in accordance with this method, carrier wafer and diamond jewel
摘要 A method is described for the production of a suitable substrate for the subsequent growth of a mono-crystalline diamond layer. This method includes the following steps:Selection of a substrate of a mono-crystalline material having a fixed lattice constant (aSi) or with a layer consisting of such a material.Manufacture of a strained silicon layer with foreign material atoms incorporated at substitutional lattice sites on the mono-crystalline material of the substrate.Transfer of the strained layer into an at least partly relaxed state in which it adopts by relaxation and through the selected foreign material concentration a lattice constant (aSi(C) which satisfies the condition n.aSi(C)=m.aD, wherein n and m are integers and aD is the lattice constant of diamond, with the relaxed layer forming the substrate or substrate surface for the epitaxial growth.
申请公布号 US6589333(B1) 申请公布日期 2003.07.08
申请号 US20000665216 申请日期 2000.09.18
申请人 MAX-PLANCK-GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN E.V. 发明人 GOESELE ULRICH;PLOESSL ANDREAS
分类号 C30B25/18;(IPC1-7):C30B25/02 主分类号 C30B25/18
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