发明名称 |
Method for the manufacture of a substrate, substrate manufactured in accordance with this method, carrier wafer and diamond jewel |
摘要 |
A method is described for the production of a suitable substrate for the subsequent growth of a mono-crystalline diamond layer. This method includes the following steps:Selection of a substrate of a mono-crystalline material having a fixed lattice constant (aSi) or with a layer consisting of such a material.Manufacture of a strained silicon layer with foreign material atoms incorporated at substitutional lattice sites on the mono-crystalline material of the substrate.Transfer of the strained layer into an at least partly relaxed state in which it adopts by relaxation and through the selected foreign material concentration a lattice constant (aSi(C) which satisfies the condition n.aSi(C)=m.aD, wherein n and m are integers and aD is the lattice constant of diamond, with the relaxed layer forming the substrate or substrate surface for the epitaxial growth.
|
申请公布号 |
US6589333(B1) |
申请公布日期 |
2003.07.08 |
申请号 |
US20000665216 |
申请日期 |
2000.09.18 |
申请人 |
MAX-PLANCK-GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN E.V. |
发明人 |
GOESELE ULRICH;PLOESSL ANDREAS |
分类号 |
C30B25/18;(IPC1-7):C30B25/02 |
主分类号 |
C30B25/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|