METHOD FOR FABRICATING X-RAY DETECTOR

摘要

PURPOSE: A method for fabricating an X-ray detector is provided to maintain a ground state and reduce the leakage current by connecting an upper portion of a channel region to the first transparent electrode connected to a ground line. CONSTITUTION: A gate(202) is formed on a transparent insulating substrate(200). A gate insulating layer(204) is formed on the transparent insulating substrate including the gate. A channel layer pattern and an etch stopper(208) are formed on a predetermined part of the gate insulating layer. An ohmic contact layer(210) is formed on the channel layer pattern. A source/drain(212a,212b) is formed on the ohmic contact layer. A ground line(213) is formed on a predetermined part of the gate insulating layer. The first protective layer(214) is formed on the resultant. The first and the second contact holes are formed by removing selectively the first protective layer. The first transparent electrode is formed on the first protective layer. The second protective layer is formed on the first protective layer. The third contact hole is formed by removing selectively the second protective layer. The second transparent electrode(224) is formed on the second protective layer.