| 摘要 |
PURPOSE: A probe card exchanging apparatus of a semiconductor wafer probe is provided, which separates a card holder automatically using a XY stage part without taking out the card hold by rotating a card holder guide. CONSTITUTION: According to a probe card exchanging apparatus for checking a wafer, a head stage(9) is installed with a card holder(10) for installing a wafer checking probe card(11) while checking a wafer(8). XY stage parts(2,3,4,5) fix the wafer with a fixing chuck(6) and move it to a checking place. A right and left guide member(21) is fixed to the head stage, and a straight moving member(22) is placed in the guide member and is moved front and rear. And an up/down moving member(24) moves up and down along the front and rear movement of the straight moving member.
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