| 摘要 |
PURPOSE:To provide a sensor using a piezoelectric element having a simple structure. CONSTITUTION:Upper electrodes A1-A8 are arranged at the specified positions on the upper surface of a disk-shaped piezoelectric element 10. Meanwhile, a ring-shaped groove, which surrounds an original point O, is formed at the positions corresponding to the lower side of the upper electrodes A1-A8. The thin flexible part is formed at the part where the ring-shaped groove is formed in the piezoelectric groove. When the peripheral part of the piezoelectric element 10 is fixed to a frame, the central part located in the inside of the ring-shaped groove functions as a weight, which is suspended with the flexible part. A lower electrode B comprising metal is formed on the entire lower surface of the piezoelectric element 10 and achieves the function for increasing the mass of the central part. When force acts on the central part by acceleration, the flexible part is bent, and the electric charge having the specified polarity is generated in the upper electrode A1-A8 formed on the flexible part. The acted acceleration is detected for every axial-direction component by measuring the electric charge. |
