| 摘要 |
<p>PURPOSE: To provide a device for cleaning a space, which is capable of stably and effectively using even under an atmosphere of a high temp. or a reactive gas or aerosol. CONSTITUTION: In the cleaning method of the space for emitting photoelectron 15 by irradiating photoelectron emission material 2 with ultraviolet ray 3 under electric field 13, charging and collecting fine particles 16 contained in the space with the photoelectron 15, the photoelectron emission material 2 is irradiated with ultraviolet ray 3 through a glass material 14 and a quartz rod is used as the glass material 14.</p> |
