发明名称 FLUID MEDIA PARTICLE ISOLATING SYSTEM
摘要 A fluid meter particle isolating system having a tortuous path formed between a pair of walls with an inlet and an outlet. The inlet is open to a contaminant-free (clean) zone while an outlet is open to a particle generating contaminated (dirty) zone. The walls include partitions that form a tortuous path separating it into a plurality of chambers. An impeller constructed of a plurality of open cells forms a piston-like structure is provided in the tortuous path and has an axis of motion parallel to the walls. Each vessel is offset axially and has four walls and a bottom surface contoured to provide a transition from one cell to the next through an exit port providing a continuous flow from the vessel in the first cell sequentially to adjacent cells to an exit port in the last vessel in the last cell.
申请公布号 KR20030059094(A) 申请公布日期 2003.07.07
申请号 KR20037001818 申请日期 2003.02.07
申请人 发明人
分类号 B01D45/00;B65G49/00;B01D45/16;H01L21/673 主分类号 B01D45/00
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