| 摘要 |
PURPOSE: An alarm generation apparatus of a wafer burn-in system is provided, which detects various error states more accurately generated in a wafer burn-in process and displays the detected error states in a message. CONSTITUTION: According to the alarm generation apparatus of a wafer burn-in system, a communication part(510) transmits and receives a data signal by being connected to a main test apparatus, and a display part(550) comprises a number of lamps, and a buzzer(560) generates an alarm. A driving control part(540) drives each lamp of the display part and the buzzer selectively according to a driving control signal. A memory unit(530) stores an alarm generation condition to turn on each lamp and to designate the kind and time of alarm differently. And a micom(520) receives the alarm generation condition through the communication part and stores it in the memory unit, and judges error state of the wafer by comparing a test result signal from the main test apparatus with an error detection reference signal, and applies the driving control signal to the driving control part by scanning error generation condition corresponding to the judged error state.
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