PURPOSE: A MEMS generator is provided to obtain the higher efficiency and the higher voltage in a smaller area than an existing generator. CONSTITUTION: A heating plate layer(12) is connected with a hot heat source. A first isolating layer(14) comprises a lower layer to shield the heating plate layer at the same level as the heating plate layer and a pair of wall layers to form a space by extending from the both ends of the lower layer to the upper side. A thin film layer(16) forms a sealed fluid chamber with the lower layer, the heating plate layer and the wall layers by forming in the upper face of the wall layers. The center of the thin film layer is moved upward and downward. A fluid(18) is stored inside the fluid chamber to be exposed on the heating plate layer. An energy converting device layer(20) converts the heat energy of the fluid to an electric energy with the thin film layer. A second isolating layer(15) is formed between the converting device layer and the thin film layer for the isolation of the fluid chamber. A coolant plate layer(22) cools the upper part of the fluid chamber by forming on the converting device layer.
