SEMICONDUCTOR DEVICE USING SINGLE CARBON NANO TUBE AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A semiconductor device using a single carbon nano tube and a method for manufacturing the same are provided to be capable of improving the degree of integration and operating speed by forming an N-type single carbon nano tube at the predetermined portion of a P-type single carbon nano tube using an implanting process after exposing the predetermined portion of the P-type single carbon nano tube. CONSTITUTION: An emitter(101a) made of a P-type carbon nano tube, a collector(101b) made of the P-type carbon nano tube, and a base(102) made of an N-type carbon nano tube are formed at the upper portion of a substrate. An emitter and collector electrode(202,203) are formed at the emitter and collector, respectively. A base electrode(201) is formed at the base.