| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fluorescent body sheet manufacturing device which can form a film of a precise fluorescent body layer by vacuum deposition, and manufacture a highly sensitive fluorescent body sheet having good X-ray characteristics. <P>SOLUTION: The fluorescent body sheet manufacturing device comprises a vacuum chamber, a vacuum exhausting means to exhaust gas inside the vacuum chamber, a crucible storing a film-forming material, and a means to heat and vaporize the film-forming material stored in the crucible by a plasma arc. <P>COPYRIGHT: (C)2003,JPO |
