发明名称 MOVABLE MAGNET TYPE LINEAR MOTOR, EXPOSURE UNIT AND METHOD FOR MANUFACTURING DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To set cogging to substantially '0' in a movable magnet type linear motor. <P>SOLUTION: A movable magnet type linear motor comprises a movable element 110 having a plurality of permanent magnets 111 arranged in a moving direction, and a stator 100 having a pectinated core 102 in which a plurality of coils are wound. The plurality of the magnets 111 are obliquely disposed so that positions of both ends of the magnets 111 in the moving direction of the element 110 are deviated at a pitch of a teeth of the pectinated core 102. <P>COPYRIGHT: (C)2003,JPO</p>
申请公布号 JP2003189589(A) 申请公布日期 2003.07.04
申请号 JP20010390540 申请日期 2001.12.21
申请人 CANON INC 发明人 KORENAGA NOBUSHIGE
分类号 H01L21/68;G03F7/20;H01L21/027;H02K41/03;(IPC1-7):H02K41/03 主分类号 H01L21/68
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