SHAFT BALANCE CONSERVING APPARATUS OF SILICON SINGLE CRYSTAL GROWING EQUIPMENT

摘要

PURPOSE: A shaft balance conserving apparatus of a silicon single crystal growing equipment is provided to minimize the influence of slip phenomenon due to the vibration of a motor when growing a silicon single crystal by using a cable. CONSTITUTION: A silicon single crystal growing equipment is used for forming an ingot by rotating a silicon crystal fixed at the end portion of a shaft using a motor in a quartz crucible. The silicon single crystal growing equipment includes a shaft balance conserving apparatus. The shaft balance conserving apparatus is provided with the first seed shaft(11) for fixing the silicon crystal at the lower portion, the second seed shaft(13) connected with a motor(20), a cable(15) connecting between the first and second seed shaft, and seed connecting chucks(16,17) for fixing the cable at each seed shaft.