| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that, after a piezoelectric film is formed as an amorphous film, a thin film type piezoelectric element is manufactured by carrying out heating treatment in crystallization, which has been a cause of the occurrence of cracks or characteristic variations. SOLUTION: With the arrangement, a contact layer is provided on a substrate, and a first electrode layer is provided thereon. A first crystal orientation control layer is provided thereon, and a second crystal orientation control layer is provided thereon. A piezoelectric body layer is provided on the second crystal orientation control layer, and a second electrode layer is provided on the piezoelectric body layer. Thus, after a film is formed with a piezoelectric thin film material, it is possible to directly manufacture a crystalline piezoelectric body layer which controls a crystal structure and a preferential orientation face, for example, by a sputtering method or the like without a crystallization step by heat treatment. COPYRIGHT: (C)2003,JPO
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