发明名称 SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To easily carry out the timing adjustment of cells in manufacturing a semiconductor device. SOLUTION: When a logic design is completed and cells are disposed, combined cells constituted of general function cells and spacer cells are disposed so as to be mixed by a fixed proportion simultaneously with the other function cells. Then, when it is necessary to insert a cell for timing adjustment after conducting timing adjustment processing, a combined cell existing between a set of cells to be timing-adjusted is specified, and the spacer cell included in the combined cell is deleted, and the cell for timing adjustment is disposed so that the timing adjustment can be conducted without changing the disposal of the cells. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003186933(A) 申请公布日期 2003.07.04
申请号 JP20010387094 申请日期 2001.12.20
申请人 FUJITSU LTD 发明人 ASADA HITOSHI
分类号 G06F17/50;H01L21/82;(IPC1-7):G06F17/50 主分类号 G06F17/50
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