ANTI-CONTAMINATING PROTECTION APPARATUS OF HEATING ELEMENT CONNECTING PART INSTALLED IN SILICON SINGLE CRYSTAL GROWING APPARATUS

摘要

PURPOSE: An anti-contaminating protection apparatus of a heating element connecting part installed in a silicon single crystal growing equipment is provided to be capable of preventing the contamination of a heating element support part and a copper electrode due to the deposition of oxide by using a protecting cover. CONSTITUTION: A silicon single crystal growing equipment is provided with a quartz crucible, a heating element(31) for supplying heat to the quartz crucible, a heating element support part(33) for supporting the heating element, a copper electrode(35) connected to the heating element support part for supplying current to the heating element, and an anti-contaminating protection apparatus of a heating element connecting part. The anti-contaminating protection apparatus includes a protecting cover(38) for preventing the contamination of a heating element support part and the copper electrode due to the deposition of oxide.