| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain stable processing by easily bringing pulse energy to a constant value even in the case that a laser oscillator has an output characteristic that the pulse energy changes depending on an oscillation duty ratio. <P>SOLUTION: At the time of processing using the laser pulse generated at changing intervals, a duty ratio for a pause section immediately before each laser pulse is set to a equal value. <P>COPYRIGHT: (C)2003,JPO</p> |
