| 摘要 |
PURPOSE: A spin coater is provided to improve productivity by promptly unloading a substrate and to prevent the defect in the development of a photoresist by suppressing the generation of static electricity during unloading. CONSTITUTION: A spin coater comprises a spin chuck(102) having plural prominences and depressions(101) for reducing the area contacting to a substrate, a drive shaft connected with the spin chuck and transmitting the rotational power to the spin chuck, and a drive unit for rotating the drive shaft. A chemical liquid preventing static electricity is coated on the face contacting to the substrate. A dispensed photoresist is uniformly coated on the substrate by the rotation of the spin chuck.
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