| 摘要 |
PURPOSE: A stocker is provided to improve productivity by preparing a re-storage button in a stocker and reducing the number of processes. CONSTITUTION: An SMC(Stocker Master Controller) controls the systems in a stocker. A re-storage button for making the re-storage possible without using an MGV(Manual Guided Vehicle) is prepared. If an error occurs in the process of delivery, the SMC decides the delivery of a cassette and generates an alarm signal and an output signal. If a worker re-stores the cassette by pressing the re-storage button, the SMC re-stores the cassette by being controlled via the re-storage button. After a storage-finish button is pressed, the stored cassette is checked.
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