| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent moisture and oxygen from entering from the outside by forming a polymer, silicon-oxynitride, and silicon-nitride on the protection film of an organic EL substrate. <P>SOLUTION: A polymer 10 is firstly formed by plasma CVD on the top face of the cathode 9 of the organic EL substrate in the low pressure vacuum container, and then, silicon-oxynitride and silicon-nitride 11 are formed on top of it. <P>COPYRIGHT: (C)2003,JPO |
