| 摘要 |
PURPOSE: A drive unit of a rubbing system is provided to prevent the defect in a rubbing process due to foreign matters by removing the foreign matters generated from friction and collision via intake/exhaust pipes and a spindle cover. CONSTITUTION: A drive unit of a rubbing system comprises a shaft(101) rotated by the rotational power transmitted from a power source, a housing(107) having a bearing(103a) supporting the shaft and a first intake/exhaust pipe(105) removing oily foreign matters, a spindle(113) having a chuck(109) supplying the rotational power to a rubbing roll and a centering(111) aligning the center of the rubbing roll, and a spindle cover(117) surrounding the spindle and having a second intake/exhaust pipe(115). |
