PATTERNING METHOD, FILM FORMING METHOD, PATTERNING DEVICE, MANUFACTURING METHOD OF ORGANIC ELECTROLUMINESCENT ELEMENT AND COLOR FILTER, ELECTRO- OPTICAL DEVICE AND ITS MANUFACTURING METHOD, ELECTRON DEVICE AND MANUFACTURING METHOD, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a new patterning method in which freedom of selection of the material is high and a film forming method, and a manufacturing method of an organic electroluminescent element using the above patterning method, and a manufacturing method of a color filter, and further an electro-optical device and its manufacturing method and an electronic equipment.

SOLUTION: A material layer 10 is arranged over the first substrate (transparent substrate 121), and by radiating light on this material layer 10, the material of this material layer 10 is moved on the first substrate (transparent substrate 121) and a material part of a desired pattern is formed. And by radiating a laser beam on the material layer of an receiving layer, the material of the material layer is injected in the receiving layer (a laser dope method), and a desired function is given to this receiving layer.

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