发明名称 |
METHOD FOR PURGING AND UNLOADING HYDROCHLORIC ACID GAS OF OXIDATION FURNACE |
摘要 |
PURPOSE: A method for purging and unloading hydrochloric acid gas of an oxidation furnace is provided to be capable of preventing the corrosion generated at the oxidation furnace due to remaining hydrochloric acid gas by completely purging the hydrochloric acid gas using optimum condition of the flow rate of nitrogen gas and exhausting pressure. CONSTITUTION: When purging in a general oxidation furnace, the flow rate of nitrogen gas is in the range of 9-10 slm and exhausting pressure is in the range of 14-16 mmH20. When unloading in the general oxidation furnace, the flow rate of nitrogen gas is in the range of 18-20 slm and the exhausting pressure is in the range of 4-6 mmH20. When purging in an FTPS oxidation furnace, the flow rate of nitrogen gas is in the range of 9-11 slm and the exhausting pressure is in the range of 9-11 mmH20. When unloading in the FTPS oxidation furnace, the flow rate of nitrogen gas is in the 19-21 slm and the exhausting pressure is in the range of 4-6 mmH20.
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申请公布号 |
KR20030057169(A) |
申请公布日期 |
2003.07.04 |
申请号 |
KR20010087546 |
申请日期 |
2001.12.28 |
申请人 |
DONGBU ELECTRONICS CO., LTD. |
发明人 |
JUNG, SE GWANG;OH, TAE WON |
分类号 |
H01L21/22;(IPC1-7):H01L21/22 |
主分类号 |
H01L21/22 |
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