| 摘要 |
PURPOSE: A wafer handler is provided to be capable of preventing the contamination and damage of a wafer surface due to the decrease of vacuum force by partially holding the lateral portion of the wafer using an air cylinder. CONSTITUTION: A wafer handler is provided with a handle part(34) having an inner space and a wafer holding part connected with the handle part for transferring a wafer by being driven with air. The wafer holding part includes a wafer grip bar(30), a fixing chuck(41) formed at one end of the wafer grip bar for fixing the wafer, a coupled chuck(42) formed at the other end of the wafer grip bar corresponding to the fixing chuck, an air cylinder(50) loaded in the inner portion of the handle for driving the coupled chuck by using air, and a cylinder operating button(60) for controlling the air.
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