PIEZO-ELECTRIC DEVICE, ITS MANUFACTURING METHOD, INK JET HEAD AND INK JET RECORDING DEVICE EQUIPPED THEREWITH

摘要

PROBLEM TO BE SOLVED: To provide a highly reliable piezo-electric device and its manufacturing method which has a high piezo-electric constant (d31) and good reproducibility of piezo-electric characteristics with minimum variations.

SOLUTION: An adhesion layer 2 made of oxidizing metal is laid on a board 1. A first electrode layer 3 made of non-oxidizing metal is laid on the layer 2. A seed 5 made of oxide of the element of the adhesion layer and distributed insularly on the first electrode layer is laid on the first electrode layer. An orientation control layer 6 made of oxide is laid on the first electrode on which the seed is formed. A piezo-electric layer 7 made of oxide is laid on the layer 6. A second electrode layer 8 is laid on the piezo-electric layer.

COPYRIGHT: (C)2003,JPO