摘要 |
PROBLEM TO BE SOLVED: To obtain a highly reliable trimming element being mounted on a semiconductor integrated circuit in which a fuse can be blown out stably and easily. SOLUTION: A fuse Fa comprising a conductive film more fusible than polysilicon, e.g. a conductive film 27 containing Ge, is formed on a semiconductor substrate 31 through an insulating film 32 thus constituting a trimming element 22. Alternatively, the trimming element is constituted of primary and secondary inductance elements generating electromagnetic induction, and a fuse. Alternatively, a fuse having a pn junction at the cutting position is formed thus constituting the trimming element. COPYRIGHT: (C)2003,JPO
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