| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam separator having a larger deflection angle and small aberration. SOLUTION: The beam separator comprises: a first pair of electrodes 15 forming a first region, in which a first electric field E<SB>1</SB>is perpendicular to a first axis A1; a pair of magnetic poles (not shown in the figure) forming a second region, in which a magnetic field B is perpendicular to each of the first axis A1 and the first electric field E<SB>1</SB>, and lying on the sample side of the first axis A1 respect to the first region; a third pair of electrodes 17 forming a third region, in which a second electric field E<SB>2</SB>is perpendicular to the first electric field E<SB>1</SB>, and lying on the sample side of the first axis A1 with respect to the second region; and a fourth pair of electrodes 18 forming a fourth region, in which a third electric field E<SB>3</SB>is perpendicular to each of a second axis A2 and the magnetic field B, and lying in the incident direction of an electron beam to a sample of the second axis A2 toward the second region with respect to the second axis A2 perpendicular to each of the first axis A1 and the magnetic field B. COPYRIGHT: (C)2003,JPO
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