发明名称 |
PIEZO-ELECTRIC DEVICE, INK JET HEAD AND METHOD FOR MANUFACTURING THEM AND INK JET RECORDING DEVICE |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce variations in properties of a piezo-electric device and improve a withstand voltage and the reliability of the piezo-electric device by forming a PZT piezo-electric thin film which is superior in its crystallizability and (001) crystal orientation. <P>SOLUTION: A first orientation control layer 13 made of an oxide thin film of a (100) orientation NaCl type crystal structure is laid on a board 11 of the piezo-electric device. A first electrode layer 14 made of a (100) orientation Pt thin film is laid on the layer 13. A second orientation control layer 15 is laid on the first electrode layer with its main component of titanate containing no Zr. A piezo-electric layer 16 made of a PZT thin film is laid on the layer 15. A second electrode layer 17 is laid on the piezo-electric layer. <P>COPYRIGHT: (C)2003,JPO</p> |
申请公布号 |
JP2003188433(A) |
申请公布日期 |
2003.07.04 |
申请号 |
JP20010384317 |
申请日期 |
2001.12.18 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
KUBO AKIKO;FUJII AKIYUKI;TOMOSAWA ATSUSHI;TORII HIDEO |
分类号 |
B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/16;H01L41/08;H01L41/09;H01L41/18;H01L41/22;H01L41/311;H01L41/316;H01L41/319 |
主分类号 |
B41J2/045 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|