发明名称 IMAGE SENSOR FOR IMPROVING CHARGE CAPACITY AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: An image sensor and a method for manufacturing the same are provided to be capable of enhancing dynamic range by increasing charge capacity of a photodiode in a pixel unit. CONSTITUTION: A gate electrode(33) is formed on a semiconductor layer(30). An n- region(34) for a photodiode is formed in the semiconductor layer(30) to align one side of the gate electrode(33). A spacer(35) is formed at both sidewalls of the gate electrode. After forming an insulating layer on the resultant structure, the insulating layer locally remains on the semiconductor layer of the n- region(34). A P0 region(38a) is formed in the n- region. At this time, convex parts(38b) are formed at interface between the n- region(34) and the P0 region(38a) due to the profile of the remaining insulating layer.
申请公布号 KR20030056060(A) 申请公布日期 2003.07.04
申请号 KR20010086219 申请日期 2001.12.27
申请人 HYNIX SEMICONDUCTOR INC. 发明人 PARK, JAE YEONG
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
代理机构 代理人
主权项
地址