| 摘要 |
A transfer robot ( 5 ) for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot ( 5 ), comprising an inspection camera ( 1 ) for detecting the stored state of the thin substrates ( 3 ) in a storage cassette ( 2 ), wherein the plurality of thin substrates ( 3 ) stored in the storage cassette ( 2 ) are carried out from the storage cassette ( 2 ) by the robot. |
