| 摘要 |
A semiconductor processing system has processing apparatuses ( 24 A, 24 B), waiting ports ( 36 A, 36 B, 36 C), a common transfer mechanism ( 40 ), and a control section ( 94 ). The control section ( 94 ) performs information processing, using a remaining process time and total transfer time, while a first target object is processed in a first one of the processing apparatuses ( 24 A, 24 B). The remaining process time is a time to complete a process on the first target object in the first processing apparatus, and to make the first target object ready for transfer from the first processing apparatus. The total transfer time is a time to take out a target object from a first one of the waiting ports ( 36 A, 36 B, 36 C), and to transfer the target object to the waiting position for the first processing apparatus. The control section ( 94 ) starts transferring a new target object from the first waiting port toward the waiting position for the first processing apparatus, based on a result of the information processing. |
