QUALITY DATA ANALYZING SYSTEM AND METHOD, PROGRAM FOR MAKING COMPUTER EXECUTE THE SAME METHOD, COMPUTER READABLE RECORDING MEDIUM WITH ITS PROGRAM RECORDED, METHOD FOR MANUFACTURING PRODUCT, QUALITY DATA ANALYZING SERVICE PROVIDING SYSTEM AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide a quality data analyzing system for supporting an analyzer to easily select quality data to be analyzed, and shortening a data processing time to be spent on the analysis.

SOLUTION: Quality data 1607 acquired by device groups 1604 and 1605 of process zones 1601, 1602, and 1603 and a log composition chart 1608 in which the correspondence of lots is written are obtained by a data collecting part 203. A connection quality log file 209 in which relevant quality data are made to correspond to the logs of the lots of the process zone 1603 and index data 208 for retrieval indicating the quality data included in the file 209 are prepared by a data preparing part 204 based on the quality data 1607 and the log composition chart 1608. An arithmetic operation processing part 212 generates an index for retrieval from the data 208, and a data inputting part 211 receives the designation of the target of analysis with the index for retrieval, and a processing part 212 selects and analyzes the data of the target of analysis from a file 209 according to the designation, and displays the analytic result at a display part 213.

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