摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing semiconductor element capable of improving production yield in manufacturing elements. SOLUTION: This method includes processes of making a semiconductor layer 14 on a sapphire substrate 1, making grooves 15a and 15b which divide the semiconductor layer 14 into element formation regions 16 where a plurality of elements are formed, and forming the elements on the semiconductor layer 14. COPYRIGHT: (C)2003,JPO |