发明名称 Semiconductor device, and method for manufacturing the same
摘要 The present invention discloses semiconductor device which comprises a metal gate electrode surrounded by polysilicon layers and a gate insulating film whose edges are thicker than the center portion formed according to a reoxidation process using a thermal process before the formation of an ion implantation region in a process for forming the metal gate electrode using a replacement process and method for manufacturing the same.
申请公布号 US2003122202(A1) 申请公布日期 2003.07.03
申请号 US20020329680 申请日期 2002.12.27
申请人 KWON HO YUP 发明人 KWON HO YUP
分类号 H01L21/334;H01L21/28;H01L21/336;H01L29/423;H01L29/49;H01L29/78;(IPC1-7):H01L29/76 主分类号 H01L21/334
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