| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a high quality share mode inkjet head whereby precise electrodes in high density and precise solid wiring patterns in high density can be formed by a simple and highly reliable method as compared to heretofore and leakage of ink, or falling or cracking of a partition wall between channel grooves does not occur. SOLUTION: A piezoelectric element plate is subjected to mechanical grinding to form the channel grooves 2. After vertical grooves 6 communicating with the channel grooves 2 are formed by emitting a laser light, the plate is subjected to electroless plating. A head substrate 5 is abraded to form longitudinal wiring patterns. The laser light is emitted to the head substrate 5 to form lateral wiring patterns communicating with the longitudinal wiring patterns. COPYRIGHT: (C)2003,JPO
|
