发明名称 User interface for a network-based mask defect printability analysis system
摘要 Mask simulation tools are typically extremely complicated to learn and to use effectively. Therefore, providing access to a mask simulation tool over a wide area network (WAN) to multiple on-line users can be very cost effective. Specifically, in a network-based simulation server, multiple users can view the same mask image, simulations, and analysis results and provide real-time comments to each other as simulation and analysis are performed, thereby encouraging invaluable problem-solving dialogue among users. The user interface for this mask simulation tool can advantageously facilitate this dialogue. For example, the user interface can include an enter box for a user to enter a message and a talk box for capturing any message sent by any user of the simulation tool using the enter box.
申请公布号 US2003126581(A1) 申请公布日期 2003.07.03
申请号 US20030372066 申请日期 2003.02.20
申请人 NUMERICAL TECHNOLOGIES, INC. 发明人 PANG LINYONG;HOWARD DANIEL WILLIAM;KARKLIN LINARD
分类号 G03F1/08;G01Q30/02;G01Q30/04;G01Q60/18;G01Q60/24;G03F1/00;G03F7/14;G03F7/20;G06F17/50;G06T7/00;H01L21/027;(IPC1-7):G06F17/50 主分类号 G03F1/08
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