发明名称 |
Methods of making electromechanical three-trace junction devices |
摘要 |
Methods of producing an electromechanical circuit element are described. A lower structure having lower support structures and a lower electrically conductive element is provided. A nanotube ribbon (or other electromechanically responsive element) is formed on an upper surface of the lower structure so as to contact the lower support structures. An upper structure is provided over the nanotube ribbon. The upper structure includes upper support structures and an upper electrically conductive element. In some arrangements, the upper and lower electrically conductive elements are in vertical alignment, but in some arrangements they are not.
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申请公布号 |
US2003124837(A1) |
申请公布日期 |
2003.07.03 |
申请号 |
US20010033032 |
申请日期 |
2001.12.28 |
申请人 |
RUECKES THOMAS;SEGAL BRENT M.;BROCK DARREN K. |
发明人 |
RUECKES THOMAS;SEGAL BRENT M.;BROCK DARREN K. |
分类号 |
B81B3/00;G11C11/34;G11C13/02;H01H59/00;H01L21/768;(IPC1-7):H01L21/476 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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