HYDROPHOBICALLY COATED PRESSURE SENSOR

摘要

The invention relates to a pressure sensor for measuring a measuring pressure. The inventive pressure sensor comprises a pressure compartment and a deformation body that can be impinged upon with a medium that is subject to the measuring pressure and that at least partially delimits the pressure compartment and closes the latter from the medium in a pressure-sealed manner. The walls of the sensor compartment comprise a hydrophobic coating that is applied by chemical vapor deposition. The hydrophobic coating preferably comprises silanes, especially silanes having one or more hydrophobic groups R and one or more anchoring groups X. Particularly preferred are the groups R-Si-X3, R1R2-Si-X2, R1R2R3-Si-X. The hydrophobic group is preferably an alkyl, perfluoroalkyl, phenyl or perfluorophenyl group. The anchoring group X is preferably OH (silanol), -X (halogenide, e.g. Cl), -OR (ester, e.g. OCH3), -NH2 (amine) or SH (mercaptosilane). Aliphatic or cyclic silazanes Si-NH-Si, e.g. hexamethyldisilazane, can also be used. Compounds of the Ry-Me-XZ with Me = e.g. Zr, Ti, can also be used.