发明名称 |
PROBE CARD COVERING SYSTEM AND METHOD |
摘要 |
The present invention discloses a cover over electrical contacts of a probe card used in testing die on a wafer. A testing machine is disclosed as having the covered probe card therein. Various mechanisms for uncovering the electrical contacts while it is located in the tester machine are disclosed. |
申请公布号 |
WO03054564(A2) |
申请公布日期 |
2003.07.03 |
申请号 |
WO2002US40982 |
申请日期 |
2002.12.19 |
申请人 |
FORMFACTOR, INC. |
发明人 |
ELDRIDGE, BENJAMIN, N.;REYNOLDS, CARL, V. |
分类号 |
G01R1/06;G01R31/28;H01L21/66 |
主分类号 |
G01R1/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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