发明名称 PROBE CARD COVERING SYSTEM AND METHOD
摘要 The present invention discloses a cover over electrical contacts of a probe card used in testing die on a wafer. A testing machine is disclosed as having the covered probe card therein. Various mechanisms for uncovering the electrical contacts while it is located in the tester machine are disclosed.
申请公布号 WO03054564(A2) 申请公布日期 2003.07.03
申请号 WO2002US40982 申请日期 2002.12.19
申请人 FORMFACTOR, INC. 发明人 ELDRIDGE, BENJAMIN, N.;REYNOLDS, CARL, V.
分类号 G01R1/06;G01R31/28;H01L21/66 主分类号 G01R1/06
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