| 摘要 |
The present invention features a metallic resistive heater and uses thereof. The resistive heater includes a metallic component that is electroconductive (i.e., has low resistivity) and an oxide, nitride, carbide, silicide, and/or boride derivative of the metal component that is electrically insulating (i.e., has high resistivity). The resistivity is controlled in part by controlling the amount of oxide, nitride, carbide, silicide, and boride formation during the deposition of the metal component and the derivative.
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