| 摘要 |
Vertical cavity surface emitting laser arrays that emit light at different wavelengths and that are suitable for wavelength multiplexed applications. Such arrays are beneficially produced using binary masks that control the thickness elements of a spacer, which in turn controls the wavelengths of light from the individual VCSEL elements. The binary masks can be used to control either deposition (growth) or etching. The binary masks, which are comprised of open areas and closed areas, are selectively applied to an intermediate VCSEL array structure.
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