| 发明名称 |
Wafer support and peripheral parts thereof |
| 摘要 |
A wafer support and peripheral parts thereof are used in a heating apparatus for semiconductor wafers and are made of a silicon nitride-silicon carbide ceramic composite containing 5 to 30 weight % silicon carbide. The wafer support and peripheral parts have superior crack healing characteristic in addition to superior thermal resistance, thermal shock resistance, and chemical stability.
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| 申请公布号 |
US2003121475(A1) |
申请公布日期 |
2003.07.03 |
| 申请号 |
US20020310998 |
申请日期 |
2002.12.06 |
| 申请人 |
CHU MIN-CHEOL;ANDO KOTOJI;SATOH SHIGEMI;SAITOH SHINJI |
发明人 |
CHU MIN-CHEOL;ANDO KOTOJI;SATOH SHIGEMI;SAITOH SHINJI |
| 分类号 |
C04B35/584;H01L21/00;H01L21/26;H01L21/324;H01L21/683;H01L21/687;(IPC1-7):C23C16/00 |
主分类号 |
C04B35/584 |
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