| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a guide rail capable of realizing light weight, high precision in positioning, and high strength. <P>SOLUTION: The guide rail 5 is a long sized beam member with a nearly square section of a silicon nitride-based sintered compact. The guide rail 5 is provided with a smaller internal diameter side surface (surface A), a larger internal diameter side surface (surface B, the opposite side of the surface A), both of through holes 19, and the right and left surfaces adjacent to the surfaces A and B, the surface C and the surface D, respectively, and a step part 15 is provided on the nearly center part of the guide rail beam on the surface B side. The through holes 19 are used for attaching devices for sucking semiconductor parts such as chips. <P>COPYRIGHT: (C)2003,JPO |
