ATMOSPHERIC PRESSURE PLASMA DISCHARGE THIN FILM-FORMING PROCESS, OPTICAL FILM, ANTI-REFLECTION FILM, AND IMAGE DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a thin film-forming process which enables the formation of thin films precisely so as to have each a uniform thickness and have various functions for highly functional films, an optical film and an anti-reflection film, each having the thin film with the uniform thickness formed through this process, and an image display device. SOLUTION: Using an atmospheric pressure plasma discharge thin film- forming apparatus having a transmission optical film thickness meter, the thickness of a thin film formed on a substrate is measured by the in-line transmission optical film thickness meter. The measurement is fed back to a film-forming condition setting unit, which adjusts thin film-forming conditions to target values to control the thickness of the thin film. COPYRIGHT: (C)2003,JPO