| 摘要 |
PROBLEM TO BE SOLVED: To provide stable contact of a probe with an electrode. SOLUTION: A head part 2 is movably mounted on a column part 1 by means of linear guides 3 and a ball screw 5, and an adjustment plate 8 is provided on an end plate 7 of the head part 2. A support plate 12 is mounted on the adjustment plate 8 by means of linear guides 11. The self weight of the plate 12 is cancelled by a spring and contact pressure is applied thereto by a low-slide resistance cylinder 13. An MFP 50 provided on an end part of the plate 12 descends together with the head part 2 by controlling drive of a servomotor 4 and makes contact with a wiring pattern P. Surface fluctuations of an inspection object W are absorbed by the plate 12 escaping therefrom and a contact pressure of the probe 51 is made constant by the cylinder 13. This causes the probe 51 to make stable contact with the electrode. COPYRIGHT: (C)2003,JPO
|
