| 摘要 |
PROBLEM TO BE SOLVED: To add various functions such as improvement in moisture resistance except for intrinsic optical characteristics. SOLUTION: The optical member 1 comprises a glass substrate 2 and an optical thin film 3 layered thereon. The optical thin film 3 is constituted by alternately depositing layers H of a high refractive index substance and layers L of a low refractive index substance. The uppermost layer of the layers constituting the optical thin film 3 has a more dense structure than other layers. Each layer of the optical thin film 3 is formed by the method of sputtering or the like on the glass substrate 2. At least one parameter in the parameters of the conditions for forming films except for the film thickness and the film material is varied when the uppermost layer is deposited from when other layers are deposited. The parameters are determined to produce a more dense structure in the uppermost layer compared to other layers. Therefore, the moisture resistance is improved because of the dense structure of the uppermost layer. COPYRIGHT: (C)2003,JPO
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