发明名称 METHOD AND APPARATUS FOR CALIBRATING A WAVELENGTH-TUNING INTERFEROMETER
摘要 The invention features a system including: i) a frequency-tunable light source (140); ii) an interferometer which during operation directs different portions of an optical wave front derived from the light source (150) to multiple surfaces (121, 102) and recombines the different portions to form an optical interference image (105a, 105b); iii) a multi-element photo-detector (170) positioned to measure an interference signal at different locations of the optical interference image in response to varying the frequency of the light source; and iv) an electronic controller (190) coupled to the light source and the photo-detector. The electronic controller varies the frequency of light at a plurality of tuning rates and records interference signals corresponding to each of said tuning rates corresponding to a determined spectral peak optical interference image.
申请公布号 WO03054474(A1) 申请公布日期 2003.07.03
申请号 WO2002US39457 申请日期 2002.12.10
申请人 ZYGO CORPORATION;DECK, LESLIE, L. 发明人 DECK, LESLIE, L.
分类号 G01B9/02;G01J9/02;(IPC1-7):G01B9/02 主分类号 G01B9/02
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