Piezoelectric actuator and a lithographic apparatus and a device manufacturing method

摘要

A lithographic projection apparatus comprising at least one of a radiation system and a projection system having at least one of a reflective and a refractive optical member, wherein the optical member is supported by at least one piezoelectric actuator for positioning the optical member. The piezoelectric actuator comprises three parallel plates stacked on top of one another with piezoelectric stacks between the plates.