发明名称 DEVICE FOR TREATING OBJECTS BY PLASMA DEPOSITION
摘要 The invention concerns a device for treating objects by plasma deposition comprising: a sealed treatment chamber (1), under reduced pressure, provided on one of its walls (4) with a passageway (2) capable of being closed, said passageway (2) enabling to feed objects to be treated (3) between the inside and the outside of the treatment chamber (1); a transfer space (5) capable of communicating, via said passageway (2), with the treatment chamber (1), so that the objects to be treated (3) are introduced into the transfer space (5) prior to being introduced into the treatment chamber (1). Said device is characterized in that the transfer space (5): delimited by discontinuous walls (6, 7), is mobile relative to the treatment chamber (1) so as to be able to move across the passageway (2) of the treatment chamber (1).
申请公布号 WO03054910(A1) 申请公布日期 2003.07.03
申请号 WO2002CH00698 申请日期 2002.12.16
申请人 AISAPACK HOLDING SA;VOIGTMANN, JEAN-PIERRE 发明人 VOIGTMANN, JEAN-PIERRE
分类号 C23C14/50;H01J1/00;H01J37/32 主分类号 C23C14/50
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