发明名称 |
Lithographic apparatus, device manufacturing method, and method of manufacturing an optical element |
摘要 |
An optical element in a lithographic apparatus is manufactured using a low coefficient of thermal expansion (CTE) material that has a CTE zero-crossing at a temperature between the temperature at which the element is manufactured and the mean temperature at which it will be operated.
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申请公布号 |
US2003123037(A1) |
申请公布日期 |
2003.07.03 |
申请号 |
US20020307485 |
申请日期 |
2002.12.02 |
申请人 |
BOX WILHELMUS JOSEPHUS |
发明人 |
BOX WILHELMUS JOSEPHUS |
分类号 |
G03F7/20;H01L21/027;(IPC1-7):G03B27/42 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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